A.J. Hart, H.K. Taylor, A.H. Slocum. International J. Nanomanufacturing 1(6):701-709, 2007.
This paper presents a suite of techniques for making Carbon Nanotube (CNT) assemblies having hierarchical two- and three-dimensional organisation: conformal films of tangled single-walled CNTs are grown on silicon microstructures, millimetre-thick films and microstructures of aligned Multi-wall CNTs (MWNTs) are grown on flat silicon substrates, large-area CNT micropatterns are fabricated by post-growth dry embossing of aligned CNT films and 3D forms of CNTs are directly grown to take the shape of microfabricated template. These growth processes use catalyst thin-films deposited by electron beam evaporation and atmospheric-pressure thermal Chemical Vapour Deposition (CVD), which is scalable from academic-level prototyping to industrial-level manufacturing.
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